TWO-AXIAL TILTING SAMPLE HOLDER FOR ELECTRON MICROSCOPE

PURPOSE:To attain stable observation even just after controlling an angle by obtaining high resolution similar to that in a 1-axis tilt even in a 2-axis tilt, so that both X-axis and Y-axis can be tilted by + or -30 deg. or more. CONSTITUTION:A belt-shaped metal thin plate 22 is linked to a pulley 21 provided in a tilt base 17, to constitute the tilt base 17 of titanium or stainless steel and the belt-shaped metal thin plate 22 of tantalum. In a width of the belt-shaped metal thin plate 22, since its part not engaged with the pulley 21 is formed wider than the part engaged with the pulley, a structure strong against vibration is obtained by preventing an influence of thermal drift from being easily received. Accordingly, a 2-axial tilting can be performed even in a narrow pole piece gap, and since the structure is strong against thermal drift and vibration, performance similar to a 1-axis tilt can be obtained.