BASE MATERIAL FOR ADHERENT SHEET FOR ADHERING WAFER AND THE SHEET

PURPOSE:To suppress influence of contaminant substance and to improve reliability of a semiconductor by laminating a first constituting layer made of at least plasticizer-containing vinyl chloride series polymer and a second constituting layer made of ethylene.(meth)acrylate copolymer. CONSTITUTION:...

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Hauptverfasser: YOSHII JUNJI, HOSONO SHIGERU, EBE KAZUYOSHI, MINEURA YOSHIHISA, MORII HITOSHI
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creator YOSHII JUNJI
HOSONO SHIGERU
EBE KAZUYOSHI
MINEURA YOSHIHISA
MORII HITOSHI
description PURPOSE:To suppress influence of contaminant substance and to improve reliability of a semiconductor by laminating a first constituting layer made of at least plasticizer-containing vinyl chloride series polymer and a second constituting layer made of ethylene.(meth)acrylate copolymer. CONSTITUTION:An adherent sheet 1 for adhering a wafer has a base material 1 of a laminating film having at least two constituting layers and an adhesive layer 2. At least one of the constituting layers is made of plasticizer-containing vinyl chloride series polymer (first constituting layer 1a). At least one layer except the first constituting layer 1a is formed of ethylene.(meth)acrylate copolymer (second constituting layer 1b) and is so formed as to be brought into contact with the layer 1a and disposed at the side of the layer 2. The second layer 1b is formed of ethylene.(meth)acrylate copolymer obtained by copolymerizing ethylene and acrylic acid and/or methacrylic acid, and a content of a constituent unit to be derived from the acrylic acid and/or methacrylic acid in the copolymer is 5-30wt.%.
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subjects BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOSITIONS BASED THEREON
COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
LAYERED PRODUCTS
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
THEIR PREPARATION OR CHEMICAL WORKING-UP
TRANSPORTING
title BASE MATERIAL FOR ADHERENT SHEET FOR ADHERING WAFER AND THE SHEET
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