ELECTRON BEAM IRRADIATION DEVICE

PURPOSE:To obtain an electron beam irradiation device capable of unifying the irradiation quantity of electron beam emitted from a scanning tube by a bias means, and reducing the energy lost in a window part and also the heat generated at the window part. CONSTITUTION:To an electron beam irradiation...

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1. Verfasser: NISHIFUJI MUTSUMI
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To obtain an electron beam irradiation device capable of unifying the irradiation quantity of electron beam emitted from a scanning tube by a bias means, and reducing the energy lost in a window part and also the heat generated at the window part. CONSTITUTION:To an electron beam irradiation device provided with a scanning tube 5, a bias means is provided to bias an electron beam 6 in the scanning tube 5 and guide the electron beam 6 to go in perpendicular to the window 7 of the scanning tube 5. The bias means consists of magnetic field generators 9 and 10 placed next to the window 7.