DILUTED AMMONIA AQUEOUS HYDROGEN PEROXIDE CLEANING SOLUTION

PURPOSE:To provide diluted ammonia aqueous hydrogen peroxide cleaning solution which can reduce heavy metal contamination from the solution itself while ability to remove particles can be maintained. CONSTITUTION:In diluted ammonia aqueous hydrogen peroxide cleaning solution comprising mixture of am...

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Sprache:eng
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Zusammenfassung:PURPOSE:To provide diluted ammonia aqueous hydrogen peroxide cleaning solution which can reduce heavy metal contamination from the solution itself while ability to remove particles can be maintained. CONSTITUTION:In diluted ammonia aqueous hydrogen peroxide cleaning solution comprising mixture of ammonium hydroxide, aqueous hydrogen peroxide and pure water, the mixture comprises a ratio of a volume of the pure water with respect to a total volume of ammonium hydroxide and aqueous hydrogen peroxide exceeding 20 but being less than 100.