WEAR-RESISTANT PROTECTIVE FILM FOR THERMAL HEAD

PURPOSE:To provide a wear-resistant protective film for thermal head which has a high hardness and small internal stress, on which a large crack is hard to be generated, and which does not have a problem of corrosion by making Hf, Si, O and N be the major constitutive elements. CONSTITUTION:A spot-f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAKANO MASAHIRO, NAKAYAMA MASATOSHI, ENDOU TSUKIMI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To provide a wear-resistant protective film for thermal head which has a high hardness and small internal stress, on which a large crack is hard to be generated, and which does not have a problem of corrosion by making Hf, Si, O and N be the major constitutive elements. CONSTITUTION:A spot-form printing element for a thermal head consists of a substrate 1 of alumina, etc., glaze glass 2 for heat accumulation, heating body layer 3 of polysilicon, etc., electrodes 4, 5 and wearresistant protective film 6, in this order from the bottom of the printing element. Generally, the protective film 6 is required to have a high hardness and small internal stress caused by heat, the composition and structure, be hard to wear out, and in addition, be stable to moistures or alkali, etc. For the wear-resistant protective film, Si, O and N are made to be the major constitutive elements, a composition represented by a formula, SiHfxOyNz (Note: x=0.01-0.5, y=0.1-2.0 and z=0.2-1.8) is desirable.