GLOW DISCHARGE SPECTRAL ANALYSIS DEVICE

PURPOSE:To exactly perform analys is in depth direction even for a sample constituted of a thin film causing interference to the light generating during the analysis. CONSTITUTION:A glow discharge spectral analysis device is provided with a hollow anode body 12 sealed at one open end with a window 14 and faced at the other open end to a sample 10, a hollow cathode body 16 sealed at one open end with the sample 10 and fixed to the anode body 12 in insulated state, and a first and a second vacuum pump 24, 28 to control the hollow part 18 formed by the window 14, the sample 10, the anode body 12 and the cathode body 16 in gas atmosphere of a specified pressure distribution. In the vicinity of the open end fixed with the sample 10, a light exit 44 constituted of a window 12B to take light in the spectroscope in the direction almost in parallel to the sample surface, a penetration space 36, a rack 40 and a window body 42 is provided and the pressure is able to control with a third vacuum pump 48.