PRESSURE SENSOR
PURPOSE: To improve the safety of a pressure sensor provided with a diaphragm which cooperates with at least one resistor the resistance value of which varies depending upon a pressure against cracking by sufficiently avoiding the deflection of the diaphragm. CONSTITUTION: Piezoelectric resistors 28...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE: To improve the safety of a pressure sensor provided with a diaphragm which cooperates with at least one resistor the resistance value of which varies depending upon a pressure against cracking by sufficiently avoiding the deflection of the diaphragm. CONSTITUTION: Piezoelectric resistors 28 and 29 are arranged on a diaphragm 24 and the resistors 28 and 29 are connected to each other so that they can form a measuring bridge together with resistors 26 and 27 which are not subjected to loads. In addition, the diaphragm 24 cooperates with a counter member 21 so that the resistors 28 and 29 which work as sensor elements when a pressure is applied can receive the pressure. |
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