ETCHING LIQUID AND PRODUCTION OF SUBSTRATE FOR LIQUID CRYSTAL DISPLAY ELEMENT BY USING THIS LIQUID

PURPOSE:To allow uniform etching and to decrease inter-electrode shorting by using the etching liquid contg. hydrogen iodide and ferric chloride as a solute in water. CONSTITUTION:An ITO(indium tin oxide) film 101 formed on a substrate 104 is etched by using the etching liquid 105 contg. the hydroge...

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Bibliographische Detailangaben
Hauptverfasser: ENOMOTO TAKASHI, DANJIYOU KATSUSHI, SHIMAMUNE MASAYUKI
Format: Patent
Sprache:eng
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