SEMICONDUCTOR POSITION DETECTOR

PURPOSE:To enable the upgrading of a resolving power on the side of a near point of a semiconductor position sensitive device(PSD) by setting a specific resistance distribution of a resistance layer so that it increases in proportion to a distance from one end according to a fixed function. CONSTITU...

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Bibliographische Detailangaben
1. Verfasser:	KUMADA KIYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GYROSCOPIC INSTRUMENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SEMICONDUCTOR DEVICES SURVEYING TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To enable the upgrading of a resolving power on the side of a near point of a semiconductor position sensitive device(PSD) by setting a specific resistance distribution of a resistance layer so that it increases in proportion to a distance from one end according to a fixed function. CONSTITUTION:When a light spot phi is impinged into a PSD element 3, an electric charge proportional to light energy is generated at an incident position and outputted from electrodes A and B passing through a surface resistance layer (P-layer) as photo-current. Here, the distribution of a specific resistance R of the P-layer is so set that it increases in proportion to a distance from one end to obtain a position signal proportional to the square of an inverse of the distance thereby enabling the upgrading of a resolving power on the side of a near point.