JPH055331B

PURPOSE:To give a sufficient strength to a reflecting mirror and to incline the mirror with a high precision by supporting the lower part of the reflecting mirror at points by piezoelectric laminating bodies and inclining the reflecting mirror in accordance with expansion and contraction of layer-built bodies. CONSTITUTION:A reflecting mirror 8 provided with a specular surface 7 is fitted to a flexible holding plate 6, and leg pieces 6a are fixed to frame poles 5. The lower part of the holding plate 6 is supported at points by the piezoelectric laminating bodies 15a and 15b arranged on X-axis and Y-axis lines in the figure. Electric signals are supplied to the piezoelectric laminating bodies 15a and 15b to expand and contract them in the Z-axis direction, thereby inclining the reflecting mirror 8 in a prescribed direction three-dimensionally. Thus, a sufficient strength is given to the specular surface 7, and the extent and the direction of the inclination of the specular surface 7 are changed with a high positional precision.