JPH055162B

PURPOSE:To realize pattern transcription by reducing projection with SOR light by a method wherein a mask pattern is reduced, and the sample is moved by reduction at the same proportion as the ratio of reduction to a mask. CONSTITUTION:The titled device is arranged so that the SOR light 11 formed in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAYASAKA TOA, IDO SATOSHI, KITAYAMA TOYOKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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