JPH05335719

PURPOSE:To prevent dispersion of wiring interval and wiring ground caused by lowering of flatness of an insulation layer while ensuring configuration and size of a fine wiring line making a thickness of the insulation layer fixed and to reduce dispersion of electric characteristic. CONSTITUTION:An i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HATTORI HISAO, YOSHINO KAN, YAMANAKA SEISAKU, IHARA HIROHIKO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To prevent dispersion of wiring interval and wiring ground caused by lowering of flatness of an insulation layer while ensuring configuration and size of a fine wiring line making a thickness of the insulation layer fixed and to reduce dispersion of electric characteristic. CONSTITUTION:An insulation layer 2 is laminated on an insulation substrate 1 and wiring shape is engraved on the insulation layer 2 by exposure and development. After a metal layer 3 is formed thereon, a photoresist 4 thereon is removed. The process is repeated again and a two layer wiring substrate can be obtained.