MACHINING METHOD FOR OPTICAL LENS BASE UNIT BY ION BEAM MILLING

PURPOSE:To provide an optical lens base unit workpiece with no problem of work accuracy and a characteristic by neutralizing an electric charge on an optical lens base unit being the work object while suppressing adhesion and mixing of impurities and heat radiation to the base unit, as compared with...

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Bibliographische Detailangaben
Hauptverfasser:	MAEKAWA HARUO, MIKAMI TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR NUCLEAR ENGINEERING NUCLEAR PHYSICS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PURPOSE:To provide an optical lens base unit workpiece with no problem of work accuracy and a characteristic by neutralizing an electric charge on an optical lens base unit being the work object while suppressing adhesion and mixing of impurities and heat radiation to the base unit, as compared with a static charge neutralizing means of conventional filament type, machining process of the optical lens base unit by ion beam milling. CONSTITUTION:In a machining method for an optical lens base unit by ion beam milling, neutralization of a static charge on the base unit 7 is performed by irradiation of an electron beam 40 from a neutralizing device 4 (or 5) arranged in a region where an ion beam does not reach.