CONTACT RETRYING SYSTEM

PURPOSE:To prevent the decrease in life of a spring probe pin and to improve contact stability by finely moving a test head to the contact direction from the contact position at the time of testing with the contact state being kept when defective contact has occurred, and guiding the test head to the contact state. CONSTITUTION:When defective contact has occurred, an object 9 is finely moved to the contact direction with a Z-axis driving mechanism 13 under the state wherein a test head 11 and contact 9A of the object under inspection 9 are kept in the contact state. Whether electric conduction is present between the test head 11 and each contact 9A of the object 9 or not is tested again by aiming a contact point. Therefore, the test head 11 is finely moved under the contact state when the defective contact has occurred, and contact retrying is performed. Thus, the consumption of the plated part of the inner wall of the tube of each spring probe pin 4 is suppressed, and the decrease in life of the pin can be prevented. Since the test head 11 can be shifted to the good contact point from the contact state, high contact stability can be obtained by retrying.