VACUUM AIRTIGHT DEVICE OF JUNCTION STRUCTURE BETWEEN CERAMIC AND METAL

PURPOSE:To hold high vacuum airtight property without generatiang cracks in a ceramics by brazing the ceramics and a metallic intermediate body in a junction pan part and by welding the metallic intermediate body and an outer peripheral metallic structure body in a welding end part. CONSTITUTION:In...

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Bibliographische Detailangaben
Hauptverfasser:	YONEDA YOICHIRO, MIZOGUCHI TAKATOO, FUKUNAGA AKIO, NAKANO NOBURO
Format:	Patent
Sprache:	eng
Schlagworte:	ALLOYS ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FERROUS OR NON-FERROUS ALLOYS LIME, MAGNESIA MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS REFRACTORIES SEMICONDUCTOR DEVICES SLAG SOLDERING OR UNSOLDERING TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS TREATMENT OF NATURAL STONE WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PURPOSE:To hold high vacuum airtight property without generatiang cracks in a ceramics by brazing the ceramics and a metallic intermediate body in a junction pan part and by welding the metallic intermediate body and an outer peripheral metallic structure body in a welding end part. CONSTITUTION:In a device which has a junction part between a ceramic 1 and metal and requires vacuum airtightness such as an alumina/titanium junction structure vacuum airtight device used for a semiconductor device, a receiving part 6 for joining with the ceramic 1 and a metallic intermediate body 4 with a bellows 7 are provided. The ceramic 1 and the receiving part 6 are brazed through a stress relaxing material 2. The intermediate body 4 having the bellows 7 is welded to metal (outer peripheral metallic structure body 3) in an end part 8 wherein welding to the outer peripheral metallic structure body 3 provided to the bellows part 7 is possible; thereby, the ceramic 1 and the metal are jointed vacuum-airtightly. It is thereby possible to prevent application of excessive stress to the ceramic 1 due to elastic deformation of the bellows part 7.