JPH05306046

PURPOSE:To carry out the transaport and stop control for a transported article in a slide-free and contact-free state by detecting the position of the transported article as image signal by a CCD sensor and drive-controlling a transport device by a CCD controller on the basis of the image signal. CONSTITUTION:A wafer transport belt 1 is driven by a pulse motor 3 through an interlocking mechanism 2. Further, the pulse motor 3 is connected with a driving device 4. Further, the driving device 4 is drive-controlled by a motor controller 6 according to an instruction supplied from a sequencer 5. In this case, a light source 7 and a CCD sensor 8 are arranged in opposed state, nipping a transport passage at the contiguous positions at the top edge in the traveling direction of the wafer transport belt 1. The CCD sensor 8 is connected with a CCD controller 9, and it is arranged between the driving device 4 and the motor controller 6 so as to receive and transmit information between the sequencer 5. Accordingly, the position detection for a transported article and the correction for stop position can be carried out favorably.