JPH05251521

PURPOSE:To position a contact end accurately and to prevent damages of a wafer to be measured and of a wiring pattern by installing at an appropriate place on a spring contact probe a piezoelectric element for excitation which can adjust a supply voltage freely and thereby forming the spring contact probe so that it may be excited freely. CONSTITUTION:A contact end 2e of a spring contact probe 2 is positioned and is allowed to abut a fine circuit wiring pattern A1 on a printed board or on a wafer to be measured A to measure a voltage wave and a voltage value. Or, in a wafer probe for measurement-alpha' which supplies voltage, a piezoelectric element for excitation 4 which can adjust a supply voltage freely is installed at an installation end of the spring contact probe 2 or at a certain place on the spring contact probe 2 which is a little to the contact end 2e from the installation end. Thereby, the spring contact probe 2 is so formed as to be excited freely. By this method, the wiring pattern and the wafer to be measured A are prevented from being damaged and the end of a contact pin can be positioned easily.