JPH05237194

PURPOSE:To shorten the time for priming by setting the inside diameter of a liquid chemical flow tube from a flow rate control part consisting of a pipe having a specific inside diameter to a downstream connector smaller than the inside diameter of a tube extending from the flow rate control part toward an upstream liquid chemical outflow part CONSTITUTION:The flow rate control part 31 consisting of the pipe having 10 to 500mu inside diameter is installed in the position apart from the connector 33 in the liquid chemical flow tube part (b). The inside diameter of the liquid chemical flow tube (d) from the flow rate control part 31 to the connect< 33 existing downstream therefrom is set smaller than the inside diameter of the liquid chemical flow tube (c) extending from the flow rate control part 31 toward the liquid chemical outflow part existing upstream thereof and larger than the inside diameter of the flow rate control part 31. Then, the liquid chemical flows in the tube without closing the inside diameter of the tube even if the tube is twisted enroute. The liquid chemical passing the flow rate control part expels the air in the tube downstream of the flow rate control part at a relatively high speed and the entire part of the tube is filled with the liquid chemical.