METHOD AND DEVICE FOR MEASURING ELECTRIC RESISTANCE FOR ANALYZING SPECIMEN
PURPOSE:To obtain measurements of high precision by measuring contactlessly the specimen position in Z-direction relative to the X-Y position, generating pressure contacting on the basis thereof while a measuring terminal reciprocates on the surface of the specimen, and measuring true electric resis...
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| creator | IMAEDA KIYOHIDE |
| description | PURPOSE:To obtain measurements of high precision by measuring contactlessly the specimen position in Z-direction relative to the X-Y position, generating pressure contacting on the basis thereof while a measuring terminal reciprocates on the surface of the specimen, and measuring true electric resistance at the pressure contacting point. CONSTITUTION:On the basis of the X-Y position of specimen 12 in the measuring range, an observation table is moved in the direction-that is, the X-Y position of specimen 12 in the measuring range is positioned as mating with a laser displacement meter 28. Thereby the specimen position in the Z-direction relative to the X-Y position in the measuring range is measured in the condition not contacting the surface of specimen 12 in the measuring range. The determined position is stored as three-dimensional shape data and displayed on a CRT 32. Upon this shape measurement, a measuring terminal 30 is elevated and sunk relative to the observation table for reciprocation in the Z-direction to put in pressure contact with the surface of the specimen 12 with a specified pressure, and the electric resistance of the pressure contacting point is measured. |
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CONSTITUTION:On the basis of the X-Y position of specimen 12 in the measuring range, an observation table is moved in the direction-that is, the X-Y position of specimen 12 in the measuring range is positioned as mating with a laser displacement meter 28. Thereby the specimen position in the Z-direction relative to the X-Y position in the measuring range is measured in the condition not contacting the surface of specimen 12 in the measuring range. The determined position is stored as three-dimensional shape data and displayed on a CRT 32. Upon this shape measurement, a measuring terminal 30 is elevated and sunk relative to the observation table for reciprocation in the Z-direction to put in pressure contact with the surface of the specimen 12 with a specified pressure, and the electric resistance of the pressure contacting point is measured.</description><language>eng</language><subject>MEASURING ; MEASURING ELECTRIC VARIABLES ; MEASURING MAGNETIC VARIABLES ; PHYSICS ; TESTING</subject><creationdate>1993</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19930903&DB=EPODOC&CC=JP&NR=H05223865A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19930903&DB=EPODOC&CC=JP&NR=H05223865A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>IMAEDA KIYOHIDE</creatorcontrib><title>METHOD AND DEVICE FOR MEASURING ELECTRIC RESISTANCE FOR ANALYZING SPECIMEN</title><description>PURPOSE:To obtain measurements of high precision by measuring contactlessly the specimen position in Z-direction relative to the X-Y position, generating pressure contacting on the basis thereof while a measuring terminal reciprocates on the surface of the specimen, and measuring true electric resistance at the pressure contacting point. CONSTITUTION:On the basis of the X-Y position of specimen 12 in the measuring range, an observation table is moved in the direction-that is, the X-Y position of specimen 12 in the measuring range is positioned as mating with a laser displacement meter 28. Thereby the specimen position in the Z-direction relative to the X-Y position in the measuring range is measured in the condition not contacting the surface of specimen 12 in the measuring range. The determined position is stored as three-dimensional shape data and displayed on a CRT 32. 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CONSTITUTION:On the basis of the X-Y position of specimen 12 in the measuring range, an observation table is moved in the direction-that is, the X-Y position of specimen 12 in the measuring range is positioned as mating with a laser displacement meter 28. Thereby the specimen position in the Z-direction relative to the X-Y position in the measuring range is measured in the condition not contacting the surface of specimen 12 in the measuring range. The determined position is stored as three-dimensional shape data and displayed on a CRT 32. Upon this shape measurement, a measuring terminal 30 is elevated and sunk relative to the observation table for reciprocation in the Z-direction to put in pressure contact with the surface of the specimen 12 with a specified pressure, and the electric resistance of the pressure contacting point is measured.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| title | METHOD AND DEVICE FOR MEASURING ELECTRIC RESISTANCE FOR ANALYZING SPECIMEN |
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