METHOD AND DEVICE FOR MEASURING ELECTRIC RESISTANCE FOR ANALYZING SPECIMEN

PURPOSE:To obtain measurements of high precision by measuring contactlessly the specimen position in Z-direction relative to the X-Y position, generating pressure contacting on the basis thereof while a measuring terminal reciprocates on the surface of the specimen, and measuring true electric resistance at the pressure contacting point. CONSTITUTION:On the basis of the X-Y position of specimen 12 in the measuring range, an observation table is moved in the direction-that is, the X-Y position of specimen 12 in the measuring range is positioned as mating with a laser displacement meter 28. Thereby the specimen position in the Z-direction relative to the X-Y position in the measuring range is measured in the condition not contacting the surface of specimen 12 in the measuring range. The determined position is stored as three-dimensional shape data and displayed on a CRT 32. Upon this shape measurement, a measuring terminal 30 is elevated and sunk relative to the observation table for reciprocation in the Z-direction to put in pressure contact with the surface of the specimen 12 with a specified pressure, and the electric resistance of the pressure contacting point is measured.