PLASMA TREATMENT DEVICE

PURPOSE:To prevent breakage of a susceptor and burning/short circuit, etc., of an electrostatic chuck sheet and further to improve yield by preventing generation of particle. CONSTITUTION:A susceptor 14 is a disc body which is formed of a thick wafer mount base 14a and a thin brim part or a flange p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ARAMI JIYUNICHI, FUKAZAWA KAZUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!