X-RAY ALIGNER

PURPOSE:To maximize the intensity of an X-ray on an exposure face and realize X-ray irradiation infinitely close to direct incidence by locating a bundle of small tubes so that the X-ray entrance ends of the small tubes will be in proximity to and along the orbit of an electron beam and the X-ray exit ends thereof in parallel with the main optical axis of the X-ray optical system. CONSTITUTION:A plurality of small tubes 8 are bent at an appropriate curvature so that an X-ray will be deflected through reflection by the internal walls thereof. The tubes 8 are so installed as to take in an X-ray from a light source 2. The bundle of the small tubes is so located that the X-ray entrance ends thereof will be in proximity to and along the orbit of an electron beam and the X-ray exit ends thereof will be in parallel with the main optical axis 3 of the X-ray optical system. This maximizes the intensity of an X-ray on an exposure plane by effectively focusing synchrotron radiation light scattering from the light source in horizontal and vertical directions. It is also possible to realize X-ray irradiation in a state which is infinitely close direct incidence throughout the region of exposure.