VACUUM STRAIGHT ADVANCE INTRODUCING DEVICE

PURPOSE:To provide the subject device prolonged in life, having a long stroke and reduced in its external dead space by integrally connecting the end part on a vacuum side of a rotary shaft to the screw shaft part of the ball screw arranged in an outside pipe and integrally connecting the base end p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	HAMAMOTO KAZUTOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CRYSTAL GROWTH DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE:To provide the subject device prolonged in life, having a long stroke and reduced in its external dead space by integrally connecting the end part on a vacuum side of a rotary shaft to the screw shaft part of the ball screw arranged in an outside pipe and integrally connecting the base end part of the straight advance shaft pipe engaged with the inner surface of the outside pipe in a non-rotatable manner and allowing its leading end part to protrude from a flange to a nut part. CONSTITUTION:An outward flange 11 is provided to the open left end of an elongated outside pipe 10 in order to connect the outside pipe 10 to a vacuum container in an airtight state and a rotary shaft 12 pierces the right closed end of the outside pipe 10 through a radial bearing 13 and a seal member 14. The right end of the screw shaft part 15a of the ball screw 15 received in the outside pipe 10 is integrally connected to the left end of the rotary shaft 12 to be extended up to the outward flange 11. The nut part 15b of the ball screw 15 straightly advances under vacuum by the rotation of the rotary shaft 12 and a straight advance shaft pipe 16 extends and contracts with respect to the screw shaft part 15a of the ball screw 15 to be able to advance straightly.