INSPECTING EQUIPMENT FOR PERFORMANCE OF SEMICONDUCTOR DEVICE

PURPOSE:To make the temperature of an IC reach a set temperature with high precision in a short time, reduce the setting time of atmosphere condition at the starting time point of a test, and prevent irregularity of measurement precision, by putting the IC in insulative liquid of large specific heat, and measuring the IC while heating and cooling it. CONSTITUTION:An IC is set on a supply transfer 10, and carried onto a turn table 5 in a thermostatic chamber 22 by a loader robot 1. Polyene biphenyl is injected in the thermostatic chamber 22, and the temperature is set for each test process. The IC which has been carried is heated or cooled by a preliminarily heating.cooling unit installed in the thermostatic chamber 22, while said IC waits the order to be set on a contact socket 4. Thus the IC temperature is set to be a specified value, and the IC is inspected in this state. Hence the IC temperature can be made to reach the set temperature with high precision in a short time, so that the setting time of atmosphere condition at the starting time point of a test can be reduced.