MANUFACTURE OF METAL FILM FIXED RESISTOR

PURPOSE:To improve the efficiency of a metal film fixed resistor without increasing the number of processes by controlling the thickness of a protective layer. CONSTITUTION:The resistor material, consisting of the metal selected from the group of nickel, chromium, tantalum, titanium, and aluminum, or their intermetallic composition, is adhered to a substrate 11, and a resistance film 12 is formed. Subsequently, alumina of 500 to 5000Angstrom in film thickness or SiO2 of 1000 to 7000Angstrom in film thickness is stuck to the whole surface of the resistance film 12 using a vapor-deposition method or a sputtering method, and a protective film 13 is formed. Then, after a nickel electrode 14 has been formed on both ends of the substrate 11 including the surface of the protective film 13, an insulating film 15 is formed between the electrodes 14 on the protective film 13. As a result, the efficiency of the title resistor can be improved by the protective film without increasing the number of processes.