WAFER ABNORMALITY SENSOR AND INSPECTING METHOD FOR WAFER

PURPOSE:To prevent the increase in an accident by sensing a crack of a wafer based on the state of an orientation flat end face. CONSTITUTION:A pair of reflection type optical sensors 9, 10 are so provided as to be opposed, for example, substantially perpendicularly to aligned orientation flat end f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WAKIYAMA FUMITOSHI, SAKAMOTO SHOZO, NISHIZUKA HIROSHI, TAKAHASHI NOBUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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