POSITIVE TYPE RESIST COMPOSITION

PURPOSE:To obtain the positive type resist compsn. which is excellent in the balance of various performances, such as heat resistance and sensitivity, by incorporating a specific alkaline soluble resin and quinone diazide compd. into the compsn. CONSTITUTION:The alkaline soluble resin contg. the res...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OZAKI HARUKI, NAGASE KYOKO, MORIUMA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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