POSITIVE TYPE RESIST COMPOSITION

PURPOSE:To obtain the positive type resist compsn. which is excellent in the balance of various performances, such as heat resistance and sensitivity, by incorporating a specific alkaline soluble resin and quinone diazide compd. into the compsn. CONSTITUTION:The alkaline soluble resin contg. the resin obtd. by condensing one or >=2 kinds of the phenols expressed by formula I and one or >=2 kinds of the compd. expressed by formula II and aldehydes as well as the quinone diazide compd. are incorporated into this compsn. In the formula I, R1 to R3 denote a hydrogen atom or 1 o 4C alkyl, etc.; (k) denotes 1 or 2. In the formula II, at least either of Y1 or Y2 is a hydroxyl group and are respectively a hydrogen atom, hydroxyl group, etc.; at least two of Z1 to Z7 are hydroxyl groups and are respectively a hydrogen atom, halogen atom, etc.; at least either of R7 or R8 of R4 to R8 is 1 to 10C alkyl group, 2 to 4C alkenyl group, cyclihexyl group or aryl group and respectively denote a hydrogen atom, 1 to 10C alkyl group, etc. Then, the balance of the various performances, such as heat resistance and sensitivity, is improved.