SEMICONDUCTOR CIRCUIT DEVICE
PURPOSE:To maintain the initial reliability of a semiconductor circuit device for a long period by probing so long as the trace of the probing does not go beyond a probing pad by providing a spacer between the probing pad and leader line as a probing inhibiting area. CONSTITUTION:On an IC chip 1 pro...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To maintain the initial reliability of a semiconductor circuit device for a long period by probing so long as the trace of the probing does not go beyond a probing pad by providing a spacer between the probing pad and leader line as a probing inhibiting area. CONSTITUTION:On an IC chip 1 provided with probing pads 2 which are connected to a circuit section through leader lines 3 and used for testing the circuit section for electrical characteristics, a spacer 4 is provided between each pad 2 and line 3 as a probing inhibiting area. For example, a step-like spacer 4 made of a conductor is provided between the pad 2 and line 3 so that level differences can be formed against the pad 2 and line 3. Therefore, even when a probing trace B remains on the pad 2, the probing can be performed over the entire area of the pad 2 while the electrical continuity between the pad 2 and line 3 is not obstructed because of the spacer 4. |
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