MEASUREMENT EQUIPMENT FOR SEMICONDUCTOR DEVICE

PURPOSE:To shorten measurement time so as to improve processing capacity by making comparison between test codes before and after the measurement and omitting a switching process measurement circuits when they are regarded as the same. CONSTITUTION:Based on a test code read from a storage 1, CPU 2 commands a measurement circuit switching unit 4 to switch the measurement circuit. After that CPU 2 operates a test power supply 3 to apply a bias current to a semiconductor device 6 to be measured, reads a measured value from a measured value reading unit 5, and then stops applying bias to power source 3. CPU 2 reads again the test code of a circuit to be measured which is used now, compares it with the next code in a comparison unit 7, and comfirms the both test codes. If they accord, CPU 2 commands a retaining part 8 to retain the measurement circuit, operates the power supply 3 while retaining the switching unit 4, and repeats the measurement so as to reduce release and switching times of relay. If they do not accord, all the relay of the switching unit 4 are released and the measurement is carried out again.