METHOD AND DEVICE FOR DETECTING EXTRANEOUS SUBSTANCE

PURPOSE:To obtain a method and a device for detecting an extraneous substance which enable easy detection of the place of occurrence of the extraneous substance being a problem in a process of manufacture of a liquid crystal display panel and also enable specification of the kind of the extraneous s...

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Bibliographische Detailangaben
Hauptverfasser: NAITOU ATSUKATSU, MUNENO RYUICHI, KAMIMURA TSUYOSHI, MATSUDA MASAKI
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To obtain a method and a device for detecting an extraneous substance which enable easy detection of the place of occurrence of the extraneous substance being a problem in a process of manufacture of a liquid crystal display panel and also enable specification of the kind of the extraneous substance. CONSTITUTION:A transparent substrate 2 is pressed on a substrate 1 being an object of inspection of an extraneous substance and the extraneous substance is detected. In order to facilitate the detection of the extraneous substance, vacuum packing 3 is applied and each of the substrates 1 and 2 are pressed under the atmospheric pressure. By pressing the two substrates 1 and 2, an interference ring 4 is generated at the position of the extraneous substance. As for a method for pressing, a press can be used. The extraneous substance is held down in a narrow gap and the position of the extraneous substance can be recognized easily with the interference ring 4 under an electric light 5 of a single wavelength component or several wavelength components. By using the interference ring 4 as a recognizing means, a device for detecting the extraneous substance quickly can be constructed.