COLD TRAP DEVICE
PURPOSE:To provide a cold trap device capable of performing the efficient cold trapping of condensible gas in a high vacuum exhaust device for highly evacuating an objective container and capable of reducing the pipeline resistance to non-condensible gas. CONSTITUTION:Condensible gas can efficiently...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | PURPOSE:To provide a cold trap device capable of performing the efficient cold trapping of condensible gas in a high vacuum exhaust device for highly evacuating an objective container and capable of reducing the pipeline resistance to non-condensible gas. CONSTITUTION:Condensible gas can efficiently be discharged by condensation without bringing the lowering of the discharge speed of non-condensible gas only by arranging an L-shaped pipeline body 1 provided with a cooling plate 2 cooled over the entire inner wall surface thereof by a cooling medium between an objective container and a vacuum pump. Therefore, a vacuum pump small- sized as compared with a conventional one can be used. |
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