SEMICONDUCTOR WAFER HOLDING HAND

PURPOSE:To provide registration function in a circumferential direction of a semiconductor wafer to a semiconductor wafer holding hand which holds an approximately disc-like semiconductor wafer having an orientation flat formed in a peripheral part thereof. CONSTITUTION:As for a semiconductor wafer...

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Bibliographische Detailangaben
1. Verfasser:	HAGA SHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To provide registration function in a circumferential direction of a semiconductor wafer to a semiconductor wafer holding hand which holds an approximately disc-like semiconductor wafer having an orientation flat formed in a peripheral part thereof. CONSTITUTION:As for a semiconductor wafer holding hand 9, thickness of parts (hand parts 17, 29b) inserted into a storage carrier 3 is made thinner than an interval between adjacent semiconductor wafers 1, 1 which are contained in the storage carrier being adjacent in the vertical direction, a turn table 17 which is rotated by a stepping motor 24 is arranged at an end part of a hand part, an optical sensor is provided for detecting an orientation flat 2 of a semiconductor wafer mounted on the turn table and a position of the orientation flat 2 is detected to rotate a turn table. Thereby, registration of the semiconductor wafer 1 is performed.