JPH0513369B

PURPOSE:To contrive the enhancement of a virtual size of a picture by scan- illuminating the surface of a reticle partly with an aperture and moving the reticle or a wafer in a direction of an optical axis of a projection optical system while syn chronizing it to the scanning. CONSTITUTION:During the first exposure, a drive device 14 drives a stage 11 in Z-axis directions i.e., in a direction of an optical axis S of a projection optical system 9 corresponding to the scanning position on a reticle 8 surface of an aperture image 4'. A drive controller 15 controls the drive quantity in Z-axis by synchronizing it to oscillation mirrors 5 and 6 so as to bring the above quantity in accordance with the characteristics of curvature of image field of the projection optical system 9 which has been worked out previously. For example, assuming that the curvature of image field of the projection optical system 9 is formed and the aperture image 4' is projected on the position distant (a) from the optical axis S on a wafer surface 10, wherein the exposure is done after the stage 11 is driven to the side of projection optical system 9 by a distance (b) compared with at the exposure of the center of optical axis, the pattern image of high resolution can be obtained also in the region distant (a) from the optical axis S almost similarly in the position fo the optical axis S.