VACUUM DEGASSING DEVICE

PURPOSE:To provide a vacuum degassing device which can prevent invasion of dust into an oil rotary pump, and can prevent deterioration of performance of the oil rotary pump. CONSTITUTION:While the exhaust port 13b of a vacuum container 13 housing a filament 3 in a vacuum ambiance is provided at the...

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Bibliographische Detailangaben
Hauptverfasser:	TOKUMITSU KIYONORI, MUTA YOSHIBUMI, NAKAGAWA MITSUNARI, TOMOSUE KUNIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE:To provide a vacuum degassing device which can prevent invasion of dust into an oil rotary pump, and can prevent deterioration of performance of the oil rotary pump. CONSTITUTION:While the exhaust port 13b of a vacuum container 13 housing a filament 3 in a vacuum ambiance is provided at the upper side of a container side-wall, a filter 14 for filtering dust is provided to the exhaust port 13b.