MICROWAVE PLASMA CVD DEVICE

PURPOSE:To improve energy supply efficiency by constituting a transmission means of a square waveguide, a mode conversion section and a circular waveguide and enabling changing of the distance between the mode conversion section and the microwave introducing window of a reaction chamber. CONSTITUTIO...

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Hauptverfasser:	OHIRA YOSHIKAZU, YAGI MASARU, SHIBUKI KUNIO, ISHIBORI KOUICHI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE:To improve energy supply efficiency by constituting a transmission means of a square waveguide, a mode conversion section and a circular waveguide and enabling changing of the distance between the mode conversion section and the microwave introducing window of a reaction chamber. CONSTITUTION:The transmission means of this microwave plasma CVD device is constituted of the square waveguide 12a, the resonance hole type mode conversion section 19 having plural slit-shaped coupling holes and the circular waveguide 12b housing the reaction chamber and is so constituted that the microwaves are converted to the prescribed mode of the circular waveguide from the square waveguide mode and the distance between the mode conversion section 19 and the microwave introducing window 13 of the reaction chamber can be changed. The energy supply efficiency to the plasma by the microwaves is thereby improved.