JPH0510606B

PURPOSE:To inspect a leak in a clean room and its cleanliness automatically with high precision by running an unmanned running vehicle automatically in the clean room along a specific track. CONSTITUTION:An XY table 3 is fitted to the elevation mechanism 2 of the unmanned running vehicle 1. A horizo...

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Bibliographische Detailangaben
1. Verfasser:	INOE YASUO
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS BLASTING CONTROLLING GYROSCOPIC INSTRUMENTS HEATING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MECHANICAL ENGINEERING NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS RANGES REGULATING SURVEYING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TARIFF METERING APPARATUS TESTING VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	PURPOSE:To inspect a leak in a clean room and its cleanliness automatically with high precision by running an unmanned running vehicle automatically in the clean room along a specific track. CONSTITUTION:An XY table 3 is fitted to the elevation mechanism 2 of the unmanned running vehicle 1. A horizontal arm 70 and a vertical arm 71 is formed atop of the movable part 4 of the table 3, and the air sampling probe 5 of a dust gauge is provided to the upper end part of the arm 71. Further, the vehicle 1 is driven under computer control to run and stop according to an optional track. Then, the vehicle 1 is guided to the position of a filter 64 where the vehicle 1 is inspected by a guidance system which runs the vehicle along a line or a track program system which runs the vehicle according to the track registered in the computer. For the purpose, the elevation mechanism 21, arm 70, and arm 71 are moved according to the program, and the probe 5 is put under the filter 64 opposite at a specific interval and scanned on the surface to attain the inspection.