JPH0510605B
PURPOSE:To achieve an automatic monitoring at a high accuracy by automatically travelling a vehicle on a specified locus in a clean room to have a probe of a dust meter automatically scanning with a displacement mechanism provided thereon. CONSTITUTION:A lift mechanism 2 displacing vertically is car...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To achieve an automatic monitoring at a high accuracy by automatically travelling a vehicle on a specified locus in a clean room to have a probe of a dust meter automatically scanning with a displacement mechanism provided thereon. CONSTITUTION:A lift mechanism 2 displacing vertically is carried on an unmanned vehicle 1 and a rotary mechanism is attached to the lift mechanism 2 to rotatively displace a mobile section thereof. The mobile section is equipped with an X-Y table 3 in a horizontal attitude and a mobile part 4 of the table 3 which displaces two-dimensionally within a horizontal plane is equipped with an air sampling probe 5 of a dust meter in a vertical attitude. The vehicle 1 is also equipped with a controller centered on a computer, a dust meter, a tape recorder for recording outputs thereof and a DC power source unit for driving all these components. |
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