JPH0510605B

PURPOSE:To achieve an automatic monitoring at a high accuracy by automatically travelling a vehicle on a specified locus in a clean room to have a probe of a dust meter automatically scanning with a displacement mechanism provided thereon. CONSTITUTION:A lift mechanism 2 displacing vertically is car...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: INOE YASUO
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE:To achieve an automatic monitoring at a high accuracy by automatically travelling a vehicle on a specified locus in a clean room to have a probe of a dust meter automatically scanning with a displacement mechanism provided thereon. CONSTITUTION:A lift mechanism 2 displacing vertically is carried on an unmanned vehicle 1 and a rotary mechanism is attached to the lift mechanism 2 to rotatively displace a mobile section thereof. The mobile section is equipped with an X-Y table 3 in a horizontal attitude and a mobile part 4 of the table 3 which displaces two-dimensionally within a horizontal plane is equipped with an air sampling probe 5 of a dust meter in a vertical attitude. The vehicle 1 is also equipped with a controller centered on a computer, a dust meter, a tape recorder for recording outputs thereof and a DC power source unit for driving all these components.