POLISHING DEVICE

PURPOSE:To uniformly generate pressing force so as to improve polishing accuracy by respectively providing lift mechanisms, which vertically move a supporting member, on both ends of the supporting member for supporting a carrier plate, and vertically smoothly moving the supporting member. CONSTITUT...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	FUJIWARA YUKIO, TAKEMURA SHINICHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To uniformly generate pressing force so as to improve polishing accuracy by respectively providing lift mechanisms, which vertically move a supporting member, on both ends of the supporting member for supporting a carrier plate, and vertically smoothly moving the supporting member. CONSTITUTION:An upper cover part 12 is support-guided and vertically smoothly moved by screw shafts 15, 22 of screw jacks 14 and guide shafts 25 of guide parts 24 provided in both side parts of a device main unit 11. As a result, a carrier plate is uniformly and surely pressed to a lower surface plate of the device main unit 11 by this upper cover part 12.