JPH0465034B

PURPOSE:To produce an aluminum material having a highly crystalline modified aluminum nitride layer, by controlling the acceleration energy for the nitrogen ion implantation to the surface of the aluminum material within a specific range. CONSTITUTION:Nitrogen cation (N2) is implanted to the surface...

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Bibliographische Detailangaben
Hauptverfasser:	IWAKI MASAYA, OOHIRA SHIGEO
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PHYSICS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE:To produce an aluminum material having a highly crystalline modified aluminum nitride layer, by controlling the acceleration energy for the nitrogen ion implantation to the surface of the aluminum material within a specific range. CONSTITUTION:Nitrogen cation (N2) is implanted to the surface of an aluminum material by an ion-implantation apparatus at an acceleration energy of 10-300KeV, preferably 50-200KeV. An aluminum material having modified aluminum nitride layer with excellent crystallinity can be produced by this process. When an aluminum single crystal is used as the matrix, the modified aluminum nitride layer formed on the surface is also made to be single crystal to obtain a material having excellent thermal conductivity and acoustic propagation. The crystallinity can be improved further by slight thermal treatment at 200-300 deg.C.