METHOD FOR PRODUCING ARTIFICIAL GRID FILM

PURPOSE:To enable an artificial grid film with a sharp interface of a lamination film, a high orientation property of a crystal orientation, and a vertical magnetization by using the ion beam sputter method and specifying acceleration energy of the ion in the artificial grid layer where a specific m...

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Bibliographische Detailangaben
Hauptverfasser: OKUNO SHIHO, YUSU KEIICHIROU, HASHIMOTO SUSUMU, INOMATA KOICHIRO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To enable an artificial grid film with a sharp interface of a lamination film, a high orientation property of a crystal orientation, and a vertical magnetization by using the ion beam sputter method and specifying acceleration energy of the ion in the artificial grid layer where a specific magnetic metal layer and a non-magnetic layer consisting of a non-magnetic transition metal are alternately laminated. CONSTITUTION:In an artificial grid film where a magnetic metal layer consisting of Co1-xFex (0