METHOD FOR DEVELOPING SINGLE CRYSTAL SUPERCONDUCTION MATERIAL

A method of growing an epitaxial like, single crystal, superconducting film (28) by promoting the epitaxial-like growth of film from a single nucleation site (24) in deference to substantially all other nucleation sites (29) on the substrate (14). The present invention contemplates the use of a mask...

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Bibliographische Detailangaben
Hauptverfasser: SUTANFUOODO AARU OBUSHINSUKII, HERUMATSUTO FURIZUKU, ROUZA YANGU
Format: Patent
Sprache:eng
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Zusammenfassung:A method of growing an epitaxial like, single crystal, superconducting film (28) by promoting the epitaxial-like growth of film from a single nucleation site (24) in deference to substantially all other nucleation sites (29) on the substrate (14). The present invention contemplates the use of a mask (18) to systematically expose sections of the substrate (14) to the deposition apparatus. This mask (18) may include an adjustable or fixed aperture (20B) and is manipulated as herein described to systematically expose areas of the substrate (14) to the deposition plasma (12).