SEMICONDUCTOR DEVICE
PURPOSE:To obtain a semiconductor device wherein reliability of contact in a contact hole part and reliability of bonding are high, regarding a semiconductor device having a multilayered wiring structure. CONSTITUTION:Barrier metal 3 is laminated on the whole surface of the lower side of first layer...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PURPOSE:To obtain a semiconductor device wherein reliability of contact in a contact hole part and reliability of bonding are high, regarding a semiconductor device having a multilayered wiring structure. CONSTITUTION:Barrier metal 3 is laminated on the whole surface of the lower side of first layer aluminum wiring 4. A bonding pad 11 is led out from second layer aluminum wiring 6 or wiring in the upper layers than the wiring 6. |
---|