CHIP LIFE TEST APPARATUS FOR SEMICONDUCTOR DEVICE
PURPOSE: To test the life of a semiconductor device in the state of a chip by providing a probe joined to the electrode of a chip disposed on a tray to be electrically connected, a substrate connected to the probe and including a circuit pattern for executing the life test on a chip and a clamp for...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE: To test the life of a semiconductor device in the state of a chip by providing a probe joined to the electrode of a chip disposed on a tray to be electrically connected, a substrate connected to the probe and including a circuit pattern for executing the life test on a chip and a clamp for fixing the substrate. CONSTITUTION: A chip 1 is disposed at a groove 2a and fixed. Then the chip 5a of a probe 5 connected to the circuit pattern 3 of a substrate 4 fixed by a clamp 6 is joined by the electrode 1a of the chip 1. Thereby the performance and electrical life test of a semiconductor can be executed in the state of a chip to prevent the packaging of a defective chip to reduce the cost and to miniaturize the scale of the tester. |
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