METHOD AND APPARATUS FOR TESTING SEMICONDUCTOR INTEGRATED CIRCUIT

PURPOSE:To provide a method and an apparatus for testing a semiconductor integrated circuit, which can effectively test performance of many logic elements without considerably reducing integration of the circuit and have excellent utility and economy. CONSTITUTION:A plurality of probe lines P and a...

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Bibliographische Detailangaben

1. Verfasser:	AZUMAI HIDEO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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