METHOD AND APPARATUS FOR TESTING SEMICONDUCTOR INTEGRATED CIRCUIT

PURPOSE:To provide a method and an apparatus for testing a semiconductor integrated circuit, which can effectively test performance of many logic elements without considerably reducing integration of the circuit and have excellent utility and economy. CONSTITUTION:A plurality of probe lines P and a plurality of sense lines S associate with a semiconductor integrated circuit IC, and a selector SD for sequentially outputting a selection signal to one of the lines P, are provided. Electronic switch devices DA including selection switches associated with the circuit IC corresponding to a plurality of lattice points where the lines P and S are crossed, to be conducted by the signal, and a plurality of electronic switches connected to a plurality of test points TP, and binary-coding devices AD connected to the lines S are provided. Multi values signals corresponding to combinations of binary-coded signals of the plurality of test points TP corresponding to the lattice points are generated at the lines S, and converted into the binary signals of the points TP by the binarizers AD.