METHOD AND DEVICE FOR DETECTING IN-LINE PARTICLE FOR SEMICONDUCTOR

METHOD AND DEVICE FOR DETECTING IN-LINE PARTICLE FOR SEMICONDUCTOR

PURPOSE:To achieve an in-line particle detection method and its device for semiconductor which realizes an in-line, real-time, and use-point evaluation of generation of dust with a high sensitivity. CONSTITUTION:A laser beam 11 is emitted in parallel with a surface of a wafer 10 to be transported an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOMADA HIROZANE, SUETAKE MIKIO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:PURPOSE:To achieve an in-line particle detection method and its device for semiconductor which realizes an in-line, real-time, and use-point evaluation of generation of dust with a high sensitivity. CONSTITUTION:A laser beam 11 is emitted in parallel with a surface of a wafer 10 to be transported and the laser beam 11 detects light which is reflected by a particle 12 on the wafer 10 using a light-reception element, thus enabling presence of a particle to be detected.