VAPOR PHASE SYNTHESIS OF SINGLE CRYSTAL DIAMOND FILM

PURPOSE:To decrease crystalline defects and irregularities of a diamond single crystal film by specifying the relation between the mol concentration of carbon atom in mixed gas of a carbon containing compound and hydrogen and the partial pressure of mixed gas of a synthetic atmosphere. CONSTITUTION:...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OOTA TOMOHIRO, KONDO HIDEKAZU, SEKIHASHI HIROSHI
Format: Patent
Sprache:eng
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