MANUFACTURE OF SUPERCONDUCTING SUBSTRATE

PURPOSE:To reduce the conductor loss by forming a 1st buffer layer directly on a sapphire substrate, a 2nd buffer layer thereupon, and further an oxide superconducting thin film. CONSTITUTION:The 1st butter layer as the base for the crystal growth of the oxide superconducting thin film is formed on the sapphire substrate and the 2nd buffer layer which has rich two-dimensional crystallinity in a plane parallel to the film formation surface is formed thereupon. The oxide superconducting thin film is formed on the 2nd buffer layer. A superconducting microwave resonator which is constituted by using a superconductive substrate manufacture as mentioned above is formed by putting a 1st substrate 20, where a superconductor line 10 is mounted, and a 2nd substrate 40, where the superconducting ground conductor 40 formed of the oxide superconducting thin film is mounted on the entire surface, in a package 50a one over the other and then fixing them with a cover 50b. The 1st substrate is formed 1mm smaller on each side than the 2nd substrate 40 by machining and removing the peripheral part.