PYROLYTIC BORON NITRIDE COMPOSITE MATERIAL AND HEAT-INSULATION MATERIAL FOR HIGH-TEMPERATURE FURNACE

PURPOSE:To provide a pyrolytic baron nitride composite material useful as a heat-insulation material for high-temperature furnace to be used in the process for producing electronic materials and material for semiconductor industry and to provide a heat-insulation material for high-temperature furnac...

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Hauptverfasser: HAGIWARA KOJI, KUBOTA YOSHIHIRO, HARADA KESAJI
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To provide a pyrolytic baron nitride composite material useful as a heat-insulation material for high-temperature furnace to be used in the process for producing electronic materials and material for semiconductor industry and to provide a heat-insulation material for high-temperature furnace produced by using the composite material. CONSTITUTION:The objective pyrolytic boron nitride composite material is produced by coating the surface of a carbon fiber product with pyrolytic boron nitride. The heat-insulation material for a high-temperature furnace is composed of the above pyrolytic boron nitride composite material.